Quartz Crystal for Thin Film Thickness Measurement using Embedded Software (PSoC)

Authors

  • K. G. Padmasine Research Scholar, Department of Electronics & Instrumentation, Bharathiar University, Coimbatore
  • S. Muruganand Assisstant Professor, Department of Electronics & Instrumentation, Bharathiar University, Coimbatore.

Keywords:

Quartz Crystal, PSoC Microcontroller, Virtual Instrument Programming

Abstract

Programmable System on Chip (PSoC) based embedded read-out design for Quartz crystal which measures thickness of a thin film during deposition has been describe in this paper. Excited quartz sensor to its resonance frequency of 5 MHz, kept nearby the substrate measures the deposited film thickness by monitoring change in quartz resonance frequency. The change in the quartz crystal resonance frequency due to deposition decreases linearly with thickness. The change in frequency count data will be sent to PC through its serial port via UART; internal blocks of PSoC to Virtual instrument program written in Lab VIEW acquires the frequency data and convert it to.

Published

2014-01-16

Issue

Vol. 1 No. 3 (2013)

Section

Articles

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